Multi-pulse atomic layer deposition of p-type SnO thin films: growth processes and the effect on TFT performance (2023)

First Author: Gomersall D
Attributed to:  The Physics and Engineering of Oxide Semiconductors for Large-Area CMOS funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.17863/cam.96320

Publication URI: https://www.repository.cam.ac.uk/handle/1810/348893

Type: Journal Article/Review