Multi-pulse atomic layer deposition of p-type SnO thin films: growth processes and the effect on TFT performance (2023)
Attributed to:
Precision Manufacturing of Flexible CMOS
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.17863/cam.95216
Publication URI: https://www.repository.cam.ac.uk/handle/1810/347799
Type: Journal Article/Review