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Multi-pulse atomic layer deposition of p-type SnO thin films: growth processes and the effect on TFT performance (2023)

First Author: Gomersall D

Attributed to: The Physics and Engineering of Oxide Semiconductors for Large-Area CMOS funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.17863/cam.95216

Publication URI: https://www.repository.cam.ac.uk/handle/1810/347799

Type: Journal Article/Review