Novel high-efficiency plasma nitriding process utilizing a high power impulse magnetron sputtering discharge (2024)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1116/6.0003277

Publication URI: http://dx.doi.org/10.1116/6.0003277

Type: Journal Article/Review

Parent Publication: Journal of Vacuum Science & Technology A

Issue: 2