Strain in heterogeneous quantum devices with atomic layer deposition (2021)
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1088/2633-4356/ac2ef7
Publication URI: http://dx.doi.org/10.1088/2633-4356/ac2ef7
Type: Journal Article/Review
Parent Publication: Materials for Quantum Technology
Issue: 4
ISSN: 2633-4356