Strain in heterogeneous quantum devices with atomic layer deposition (2021)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/2633-4356/ac2ef7

Publication URI: http://dx.doi.org/10.1088/2633-4356/ac2ef7

Type: Journal Article/Review

Parent Publication: Materials for Quantum Technology

Issue: 4

ISSN: 2633-4356