Characterisation and modelling of nonlinear resonance behaviour on very-high-frequency silicon nanoelectromechanical resonators (2023)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.mne.2023.100212

Publication URI: http://dx.doi.org/10.1016/j.mne.2023.100212

Type: Journal Article/Review

Parent Publication: Micro and Nano Engineering