Thermomechanical Actuation of Microcantilevers Improved by Selective Post-Manufacturing Material Deposition (2023)
Attributed to:
Integrated Plasma Source Focused Ion Beam with Scanning Electron Microscope
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.2139/ssrn.4410458
Publication URI: http://dx.doi.org/10.2139/ssrn.4410458
Type: Preprint