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Thermomechanical Actuation of Microcantilevers Improved by Selective Post-Manufacturing Material Deposition (2023)

First Author: Pruchnik B

Attributed to: Integrated Plasma Source Focused Ion Beam with Scanning Electron Microscope funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.2139/ssrn.4410458

Publication URI: http://dx.doi.org/10.2139/ssrn.4410458

Type: Preprint