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Finite element analysis of optical displacement detection for silicon Nano-Electro-Mechanical (NEM) resonators (2023)

First Author: Fernando J

Attributed to: Nano-Opto-Electro-Mechanical Integrated Oscillator Arrays for Energy-Efficient Physical Reservoir Computing (NOEMIA) funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Type: Conference/Paper/Proceeding/Abstract