(Invited) Atomistic Insights into Continuous and Area-Selective ALD Processes: First-Principles Simulations of the Underpinning Surface Chemistry (2023)
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1149/ma2023-02291458mtgabs
Publication URI: http://dx.doi.org/10.1149/ma2023-02291458mtgabs
Type: Journal Article/Review
Parent Publication: ECS Meeting Abstracts
Issue: 29