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(Invited) Atomistic Insights into Continuous and Area-Selective ALD Processes: First-Principles Simulations of the Underpinning Surface Chemistry (2023)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1149/ma2023-02291458mtgabs

Publication URI: http://dx.doi.org/10.1149/ma2023-02291458mtgabs

Type: Journal Article/Review

Parent Publication: ECS Meeting Abstracts

Issue: 29