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Fabrication of quantum emitters in aluminum nitride by Al-ion implantation and thermal annealing (2024)

First Author: Nieto Hernández E

Attributed to: Manufacturing scalable semiconductor quantum light sources funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1063/5.0185534

Publication URI: http://dx.doi.org/10.1063/5.0185534

Type: Journal Article/Review

Parent Publication: Applied Physics Letters

Issue: 12