Acoustic mode confinement using coupled cavity structures in UHF unreleased MEMS resonators (2019)

First Author: Erbes A
Attributed to:  Innovation Knowledge Centre for Smart Infrastructure and Construction funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.17863/cam.32453

Publication URI: https://www.repository.cam.ac.uk/handle/1810/285083

Type: Journal Article/Review