Method for inferring the mechanical strain of GaN-on-Si epitaxial layers using optical profilometry and finite element analysis (2021)

First Author: Spiridon B
Attributed to:  Beyond Blue: New Horizons in Nitrides (Platform Grant Renewal) funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.17863/cam.68242

Publication URI: https://www.repository.cam.ac.uk/handle/1810/321120

Type: Journal Article/Review