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EUV-induced hydrogen desorption as a step towards large-scale silicon quantum device patterning. (2024)

First Author: Constantinou P

Attributed to: Atomically Deterministic Doping and Readout For Semiconductor Solotronics (ADDRFSS) funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1038/s41467-024-44790-6

PubMed Identifier: 38267459

Publication URI: http://europepmc.org/abstract/MED/38267459

Type: Journal Article/Review

Volume: 15

Parent Publication: Nature communications

Issue: 1

ISSN: 2041-1723