Measuring coefficient of thermal expansion of materials of micrometre size using SEM/FIB microscope with in situ MEMS heating stage. (2024)
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1111/jmi.13290
PubMed Identifier: 38482774
Publication URI: http://europepmc.org/abstract/MED/38482774
Type: Journal Article/Review
Volume: 295
Parent Publication: Journal of microscopy
Issue: 2
ISSN: 0022-2720