On the reproducibility of electron-beam lithographic fabrication of photonic nanostructures. (2024)
Attributed to:
MISSION (Mid- Infrared Silicon Photonic Sensors for Healthcare and Environmental Monitoring)
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1038/s41598-024-58842-w
PubMed Identifier: 38622168
Publication URI: http://europepmc.org/abstract/MED/38622168
Type: Journal Article/Review
Volume: 14
Parent Publication: Scientific reports
Issue: 1
ISSN: 2045-2322