On the reproducibility of electron-beam lithographic fabrication of photonic nanostructures (2024)
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1038/s41598-024-58842-w
Publication URI: http://dx.doi.org/10.1038/s41598-024-58842-w
Type: Journal Article/Review
Parent Publication: Scientific Reports
Issue: 1