Low Dielectric Filling Factor Millimeter-Wave Photonic Crystal Resonator Micromachined From NTD High-Resistivity Silicon (2024)
Abstract
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Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1109/tmtt.2024.3396631
Publication URI: http://dx.doi.org/10.1109/tmtt.2024.3396631
Type: Journal Article/Review
Parent Publication: IEEE Transactions on Microwave Theory and Techniques
Issue: 11