Benchmarking of X-Ray Fluorescence Microscopy with Ion Beam Implanted Samples Showing Detection Sensitivity of Hundreds of Atoms. (2024)
Abstract
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Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1002/smtd.202301610
PubMed Identifier: 38693080
Publication URI: http://europepmc.org/abstract/MED/38693080
Type: Journal Article/Review
Volume: 8
Parent Publication: Small methods
Issue: 10
ISSN: 2366-9608