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On-machine correction of form error for structured surfaces with anisotropic diffusion filter (2024)

First Author: Wang M

Attributed to: Future Advanced Metrology Hub funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.measurement.2024.115098

Publication URI: http://dx.doi.org/10.1016/j.measurement.2024.115098

Type: Journal Article/Review

Parent Publication: Measurement