Benchmarking of X-Ray Fluorescence Microscopy with Ion Beam Implanted Samples Showing Detection Sensitivity of Hundreds of Atoms. (2024)

First Author: Masteghin MG
Attributed to:  Route to high-precision positioning of single ion-implanted impurities in silicon funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1002/smtd.202301610

PubMed Identifier: 38693080

Publication URI: http://europepmc.org/abstract/MED/38693080

Type: Journal Article/Review

Parent Publication: Small methods

ISSN: 2366-9608