Thermodynamics of Ga 2 O 3 Heteroepitaxy and Material Growth Via Metal Organic Chemical Vapor Deposition (2024)
Abstract
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Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1021/acsaelm.4c00535
Publication URI: http://dx.doi.org/10.1021/acsaelm.4c00535
Type: Journal Article/Review
Parent Publication: ACS Applied Electronic Materials
Issue: 7