2D Super-Resolution Metrology Based on Superoscillatory Light. (2024)

First Author: Wang Y
Attributed to:  Capability for wafer-level sub-nanometre scale imaging funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1002/advs.202404607

PubMed Identifier: 39099329

Publication URI: http://europepmc.org/abstract/MED/39099329

Type: Journal Article/Review

Parent Publication: Advanced science (Weinheim, Baden-Wurttemberg, Germany)

ISSN: 2198-3844