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Error compensation for near optical coaxial phase measuring deflectometry with refraction error model (2024)

First Author: Li Y

Attributed to: Next Generation Metrology Driven by Nanophotonics funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1364/oe.520849

PubMed Identifier: 38859508

Publication URI: http://europepmc.org/abstract/MED/38859508

Type: Journal Article/Review

Parent Publication: Optics Express

Issue: 12

ISSN: 1094-4087