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Anisotropic Effects in Local Anodic Oxidation Nanolithography on Silicon Surfaces: Insights from ReaxFF Molecular Dynamics (2024)

First Author: Gao J

Attributed to: A hybrid precision manufacturing platform for next-generation of nanoscale products funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1021/acs.langmuir.4c01129

PubMed Identifier: 39008811

Publication URI: http://europepmc.org/abstract/MED/39008811

Type: Journal Article/Review

Parent Publication: Langmuir

ISSN: 0743-7463