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Polishing of {100} and {111} single crystal diamond through the use of Chemical Mechanical Polishing (2014)

First Author: Thomas E

Attributed to: Nanocrystalline diamond for Micro-Electro-Mechanical Systems (MEMS) funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.48550/arxiv.1402.3446

Publication URI: https://arxiv.org/abs/1402.3446

Type: Other