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Confining Liquids on Silicon Surfaces to Lubricate MEMS (2015)

First Author: Jonathan Y. Leong

Attributed to: Implementing Lubrication in Micro-Electro-Mechanical Systems funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.60692/9v44m-r8h61

Publication URI: https://gresis.osc.int//doi/10.60692/9v44m-r8h61

Type: Other