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Low temperature growth and optical properties of a-Ga2O3 deposited on sapphire by plasma enhanced atomic layer deposition (2019)

First Author: Roberts J

Attributed to: Beyond Blue: New Horizons in Nitrides (Platform Grant Renewal) funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.48550/arxiv.1908.06914

Publication URI: https://arxiv.org/abs/1908.06914

Type: Other