Theory, Design, and Characterization of Nanoelectromechanical Relays for Stiction-Based Non-Volatile Memory (2022)
Abstract
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Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1109/jmems.2021.3138022
Publication URI: http://dx.doi.org/10.1109/jmems.2021.3138022
Type: Journal Article/Review
Parent Publication: Journal of Microelectromechanical Systems
Issue: 2