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Multi-Functional Metasurfaces as a Platform to Realize Ultra-Compact Confocal Instrumentation for on-Machine Metrology (2024)

First Author: Townend D

Attributed to: Next Generation Metrology Driven by Nanophotonics funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1002/admt.202400387

Publication URI: http://dx.doi.org/10.1002/admt.202400387

Type: Journal Article/Review

Parent Publication: Advanced Materials Technologies