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Graphene-based capacitive monolithic microphone with optimized air gap thickness and damping (2024)

First Author: Jiang Y

Attributed to: Graphene Micro-sensors for Adaptive Acoustic Transduction (GMAAT) funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1116/6.0004021

Publication URI: http://dx.doi.org/10.1116/6.0004021

Type: Journal Article/Review

Parent Publication: Journal of Vacuum Science & Technology B

Issue: 6