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Ductile Dicing for Optical Facets and Waveguides in Silicon Nitride (2023)

First Author: Gow P

Attributed to: Ultra-precision machining of optoelectronics and microsystems (UPROAR) funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/cleo/europe-eqec57999.2023.10232581

Publication URI: https://api.elsevier.com/content/abstract/scopus_id/85175731323

Type: Conference/Paper/Proceeding/Abstract