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Anisotropic Ta2O5 photonic crystal waveguide etching using inductively coupled plasma etching (2025)

First Author: Wang W

Attributed to: Photonics @ Interface: Heterogeneous Integrations for Generation, Detection, Conversion, and Modulation funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1116/6.0004211

Publication URI: http://dx.doi.org/10.1116/6.0004211

Type: Journal Article/Review

Parent Publication: Journal of Vacuum Science & Technology A

Issue: 2