Impact of precursor dosing on the surface passivation of AZO/AlO x stacks formed using atomic layer deposition. (2025)
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1039/d4ya00552j
PubMed Identifier: 39958755
Publication URI: http://europepmc.org/abstract/MED/39958755
Type: Journal Article/Review
Parent Publication: Energy advances
ISSN: 2753-1457