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Areal surface measurement using chromatic focus variation (2023)

First Author: Mustafa A

Attributed to: Future Advanced Metrology Hub funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/icoim60566.2023.10491571

Publication URI: http://dx.doi.org/10.1109/icoim60566.2023.10491571

Type: Conference/Paper/Proceeding/Abstract