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Incoherent partial superposition modeling for single-shot angle-resolved ellipsometry measurement of thin films on transparent substrates (2024)

First Author: Peng L

Attributed to: Future Advanced Metrology Hub funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1364/oe.517216

Publication URI: http://dx.doi.org/10.1364/oe.517216

Type: Journal Article/Review

Parent Publication: Optics Express

Issue: 9