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Controlling the silicon nanowire tapering angle in dense arrays of silicon nanowires using deep reactive ion etching (2013)

First Author: Engstrom D

Attributed to: Multi-marker Nanosensors for HIV funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1116/1.4793500

Publication URI: http://dx.doi.org/10.1116/1.4793500

Type: Journal Article/Review

Parent Publication: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Issue: 2

ISSN: 21662754 21662746