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3-D patterning of silicon by laser-initiated, liquid-assisted colloidal (LILAC) lithography. (2015)

First Author: Ulmeanu M

Attributed to: Metrology concepts for a new generation of plasma manufacturing with atom-scale precision funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.jcis.2014.11.001

PubMed Identifier: 25465198

Publication URI: http://europepmc.org/abstract/MED/25465198

Type: Journal Article/Review

Volume: 447

Parent Publication: Journal of colloid and interface science

ISSN: 0021-9797