Deposition of phase pure nickel sulfide thin films from bis(O-alkylxanthato)-nickel(II) complexes by the aerosol assisted chemical vapour deposition (AACVD) method (2015)
Abstract
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Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1016/j.mssp.2014.10.023
Publication URI: http://dx.doi.org/10.1016/j.mssp.2014.10.023
Type: Journal Article/Review
Parent Publication: Materials Science in Semiconductor Processing
ISSN: 13698001