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Etching characteristics of crystal quartz by surface wave microwave induced plasma (2020)

First Author: Adam B.

Attributed to: EPSRC Centre for Innovative Manufacturing in Ultra Precision funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Type: Other

Volume: 11568

Parent Publication: Proceedings of SPIE - The International Society for Optical Engineering

ISSN: 1996756X 0277786X