Sputtering Grown Wide Band Gap AlN Thin Films for High Power Capacitors (2024)
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1109/wipdaeurope62087.2024.10797419
Publication URI: http://dx.doi.org/10.1109/wipdaeurope62087.2024.10797419
Type: Conference/Paper/Proceeding/Abstract