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Comparison of rigorous scattering models to accurately replicate the behaviour of scattered electromagnetic waves in optical surface metrology (2025)

First Author: Hooshmand H

Attributed to: AI-enhanced integrated surface metrology funded by Horizon Europe Guarantee

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.jcp.2024.113519

Publication URI: http://dx.doi.org/10.1016/j.jcp.2024.113519

Type: Journal Article/Review

Parent Publication: Journal of Computational Physics