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Evaluating approximate and rigorous scattering models in virtual coherence scanning interferometry for improved surface topography measurement (2024)

First Author: Hooshmand-Ziafi H

Attributed to: AI-enhanced integrated surface metrology funded by Horizon Europe Guarantee

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1117/12.3027079

Publication URI: http://dx.doi.org/10.1117/12.3027079

Type: Conference/Paper/Proceeding/Abstract