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Comparison of Fourier optics-based methods for modeling coherence scanning interferometry (2024)

First Author: Hooshmand H

Attributed to: AI-enhanced integrated surface metrology funded by Horizon Europe Guarantee

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1117/1.oe.63.4.044102

Publication URI: http://dx.doi.org/10.1117/1.oe.63.4.044102

Type: Journal Article/Review

Parent Publication: Optical Engineering

Issue: 04

ISSN: 0091-3286