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Comparison of approximate methods for modelling coherence scanning interferometry (2023)

First Author: Hooshmand-Ziafi H

Attributed to: AI-enhanced integrated surface metrology funded by Horizon Europe Guarantee

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1117/12.2673657

Publication URI: http://dx.doi.org/10.1117/12.2673657

Type: Conference/Paper/Proceeding/Abstract