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Comparison of coherence scanning interferometry, focus variation and confocal microscopy for surface topography measurement (2023)

First Author: Hooshmand H.

Attributed to: AI-enhanced integrated surface metrology funded by Horizon Europe Guarantee

Abstract

No abstract provided

Bibliographic Information

Type: Other

Parent Publication: European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 23rd International Conference and Exhibition, EUSPEN 2023