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Novel Technique for Backside Alignment Using Direct Laser Writing. (2025)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.3390/mi16030255

PubMed Identifier: 40141866

Publication URI: http://europepmc.org/abstract/MED/40141866

Type: Journal Article/Review

Volume: 16

Parent Publication: Micromachines

Issue: 3

ISSN: 2072-666X