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Novel Technique for Backside Alignment Using Direct Laser Writing (2025)

First Author: Mitchell M

Attributed to: A New Method to Make Programmable Transducers in Microelectromechanical Systems (P-MEMS) funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.3390/mi16030255

Publication URI: http://dx.doi.org/10.3390/mi16030255

Type: Journal Article/Review

Parent Publication: Micromachines

Issue: 3