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Superconducting Nb x Ti1- x N prepared at high deposition rates with plasma-enhanced atomic layer deposition and substrate biasing (2025)

First Author: Peeters S

Attributed to: Quantum-Enhanced Interferometry for New Physics funded by SPF

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1116/5.0254908

Publication URI: http://dx.doi.org/10.1116/5.0254908

Type: Journal Article/Review

Parent Publication: AVS Quantum Science

Issue: 2