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AlN-on-sapphire microdisk resonators for precise on-chip temperature sensing (2026)

First Author: Armstrong D

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1063/5.0313161

Publication URI: http://dx.doi.org/10.1063/5.0313161

Type: Journal Article/Review

Parent Publication: Journal of Applied Physics

Issue: 7