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First-principles mechanism of TDMAH adsorption on pristine and laser-functionalized graphene toward area-selective atomic layer deposition of HfO2 (2026)

First Author: Khosravi A

Attributed to: West of Scotland Supercomputing Centre for Academia and Industry (Capital) funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.apsusc.2026.166554

Publication URI: http://dx.doi.org/10.1016/j.apsusc.2026.166554

Type: Journal Article/Review

Parent Publication: Applied Surface Science